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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201

Materials Science Forum Vols. 196-201

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201

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Paper Title Page

Study of Gallium and Antimony Cluster Formation în GaSb Bulk Crystals Grown from Nonstoichiometric Melts

Authors: N.A. Bert, V.V. Chaldyshev, A.E. Kunitsyn, A.G. Milvidskaya, M.G. Mil'vidskii

1797

TEM Evaluation of Ordered and Modulated Structures in MBE-Grown InAlAs Crystals on (110)InP

Authors: O. Ueda, Y. Nakata, S. Muto

1801

SF₆/0₂ and CF₄/0₂ Reactive-Ion-Etching-Induced Defects in Silicon Studied by Photoluminescence Spectroscopy: Role of Oxygen

Authors: I.A. Buyanova, Anne Henry, Bo Monemar, J. Lennart Lindström, Moissei K. Sheinkman, G.S. Oehrlein

1807

Measurements of Polishing-Induced Residual Damages in Silicon Wafers Using Noncontact Photoconductivity Amplitude Technique

Authors: Y. Ogita, M. Nakano, H. Masumura

1813

Lifetime Identification of Thermal Oxidation Process Induced Contamination in Silicon Wafers

Authors: H. Daio, K. Yakushiji, A. Buczkowski, F. Shimura

1817

Transmission Electron Microscopy of LatticeDefects in CZ-Silicon Wafer Formed by Two-Stage Annealing

Authors: Shin Ishikawa, Mituyoshi Matsushita, Jun-ichi Shimomura

1823

Rhombic Aggregation of Dislocations in CZ-Si Crystal

Authors: K. Minowa, Seiichi Isomae, Michio Kitano

1829

Study of Near-Surface Microdefects in Czochralski-Si Wafers After a CMOS Thermal Process

Authors: Y. Kitagawara, K. Aihara, S. Oka, Takao Takenaka

1835

Subsurface Damage in Single Diamond Tool Machined SI Wafers

Authors: Teimuraz Mchedlidze, Ichiro Yonenaga, Koji Sumino

1841

Interface Defects of Bonded Silicon Wafers

Authors: Manfred Reiche, Q.-Y. Tong, U.M. Gösele, J. Heydenreich

1847