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HomeMaterials Science ForumMaterials Science Forum Vols. 196-201

Materials Science Forum Vols. 196-201

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.196-201

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Paper Title Page

Direct Bonding of Silicon Wafers with Grooved Surfaces: Characterization of Defects and Application to High Power Devices

Authors: Igor V. Grekhov, T.S. Argunova, Mikhail Yu. Gutkin, L.S. Kostina, T.V. Kudryavtzeva

1853

Oxygen Precipitation in CZ Silicon Crystals Contaminated with Iron

Authors: J. Jablonski, Bo Shen, Teimuraz Mchedlidze, M. Imai, Koji Sumino

1859

Evaluation Method of Precipitated Oxygen Concentration in Low Resistivity Silicon Wafers Using X-Ray Diffration

Authors: Hiroshi Takeno, Michihiro Mizuno, Satoshi Ushio, Takao Takenaka

1865

Precipitates in Antimony Implanted Silicon

Authors: Yoshio Kikuchi, F. Uesugi, S. Kaszczyszyn, Masataka Kase, M. Yoshida, K. Watanabe, I. Hashimoto

1871

Secondary Defects and Deep Levels in N-Si Induced by High Energy P Ion Implantation

Authors: S. Tatsukawa, Yuko Nakahara, Satoshi Matsumoto

1875

High Energy Si, Zn and Ga Ion Implantation into GaAs on Si

Authors: M. Tamura, T. Saitoh

1881

Local Structure Analysis around Arsenic Implanted into Silicon by XAFS Technique

Authors: Yoshimasa Horii, Masataka Kase, Satoshi Komiya, Yusuke Kikuchi

1887

Effects of Si₃N₄ Films on Diffusion of Boron and Extended Defects in Silicon during Post-Implantation Annealing

Authors: Y. Zaitsu, K. Osada, T. Shimizu, Satoshi Matsumoto, M. Yoshida, Eisuke Arai, Takeji Abe

1891

Photoluminescence Defect Diagnostics in Poly-Si Thin Films

Authors: Sergei S. Ostapenko, A.U. Savchuk, G. Nowak, J. Lagowski, L. Jastrzebski

1897

DLTS of Polysilicon Emitter Solar Cells

Authors: D.P. Parton, Tomas Markvart, Peter Ashburn, J.C. Carter, L. Castañer

1903

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