6H-SiC MOS Capacitors on Sloped Surfaces: Realisation, Characterisation and Electrical Results

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Periodical:

Materials Science Forum (Volumes 264-268)

Edited by:

G. Pensl, H. Morkoç, B. Monemar and E. Janzén

Pages:

1029-1032

DOI:

10.4028/www.scientific.net/MSF.264-268.1029

Citation:

F. Lanois et al., "6H-SiC MOS Capacitors on Sloped Surfaces: Realisation, Characterisation and Electrical Results", Materials Science Forum, Vols. 264-268, pp. 1029-1032, 1998

Online since:

February 1998

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$35.00

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