Materials Science Forum Vols. 264-268

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https://doi.org/10.4028/www.scientific.net/MSF.264-268

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Paper Title Page

The Characterization of SiC Hot-Implanted with Ga ⁺

Authors: Yasuhito Tanaka, Naoto Kobayashi, Mitsuru Hasegawa, Sadafumi Yoshida, Yuuki Ishida, T. Nishijima, N. Hayashi

713

Ion Implantation Doping in SiC and its Device Applications

Authors: Mulpuri V. Rao, J. Gardner, Arthur H. Edwards, N. Papanicolaou, G. Kelner, O.W. Holland, Mario Ghezzo, James W. Kretchmer

717

Hot-Implantation of Phosphorus Ions into 6H-SiC

Authors: L. Bouwhuis, Takeshi Ohshima, Hisayoshi Itoh, Y. Aoki, Masahito Yoshikawa, Isamu Nashiyama, Motohiro Iwami

721

Raman, Low Temperature Photoluminescence and Transport Investigation of N-Implanted 6H-SiC

Authors: P. Thomas, Sylvie Contreras, Sandrine Juillaguet, Jean-Louis Robert, Jean Camassel, J. Gimbert, Thierry Billon, C. Jaussaud

725

Investigation of Ion-Impantation Induced Damage in 6H-SiC by RSB/C and PAS

Authors: H. Wirth, W. Anwand, Gerhard Brauer, M. Voelskow, D. Panknin, Wolfgang Skorupa, Paul G. Coleman

729

Analysis of Aluminium Ion Implantation Damage into 6H-SiC Epilayers

Authors: Narcis Mestres, M. Ben El Mekki, F.J. Campos, Jordi Pascual, Erwan Morvan, Philippe Godignon, José Millan, Giorgio Lulli

733

Stoichiometric Disturbances in Ion Implanted Silicon Carbide

Authors: Erwan Morvan, Josep Montserrat, Jose Rebollo, D. Flores, Xavier Jordá, Marie Laure Locatelli, Laurent Ottaviani

737

6H-SiC Crystallinity Behaviour upon B Implantation Studied by Raman Scattering

Authors: T. Paskova, E. Valcheva, Ivan G. Ivanov, Rositza Yakimova, Susan Savage, Nils Nordell, Chris I. Harris

741

Study of Thermal Annealing of Vacancies in Ion Implanted 3C-SiC by Positron Annihilation

Authors: Takeshi Ohshima, Akira Uedono, Hisayoshi Itoh, L. Bouwhuis, Ryoichi Suzuki, Toshiyuki Ohdaira, Y. Aoki, Masahito Yoshikawa, Tomohisa Mikado, Hajime Okumura, Sadafumi Yoshida, Shoichiro Tanigawa, Isamu Nashiyama

745

Effect of Hot Isostatic Press Annealing for Ion-Implanted Silicon Carbide

Authors: Yoshitaka Hirabayashi, M. Furuya, K. Hirai, Hideto Takano, K. Yabuta, Mikito Kumagai

749