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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342

Materials Science Forum Vols. 338-342

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342

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Paper Title Page

Structural Investigation on the Nature of Surface Defects Present in Silicon Carbide Wafers Containing Varying Amount of Micropipes

Authors: M. Shamsuzzoha, Stephen E. Saddow, T.E. Schattner, Li Jin, Michael Dudley, S.V. Rendakova, Vladimir Dmitriev

453

In-situ Observation of SiC Bulk Single Crystal Growth by X-Ray Topography

Authors: Tomohisa Kato, Naoki Oyanagi, Hirotaka Yamaguchi, Yukio Takano, Shin Ichi Nishizawa, Kazuo Arai

457

X-ray Topographic Study of SiC Crystal at High Temperature

Authors: Hirotaka Yamaguchi, Naoki Oyanagi, Tomohisa Kato, Yukio Takano, Shin Ichi Nishizawa, Wook Bahng, Sadafumi Yoshida, Kazuo Arai

461

Synchrotron White Beam Topography Studies of 2H SiC Crystals

Authors: Michael Dudley, W. Huang, William M. Vetter, Philip G. Neudeck, J. Anthony Powell

465

Synchrotron White Beam X-ray Topography and Atomic Force Microscopy Studies of a 540R-SiC Lely Platelet

Authors: William M. Vetter, Michael Dudley, W. Huang, Philip G. Neudeck, J. Anthony Powell

469

X-ray Characterization of 3 inch Diameter 4H and 6H-SiC Experimental Wafers

Authors: T.A. Kuhr, William M. Vetter, Michael Dudley, Marek Skowronski

473

Origin of Threading Dislocation Arrays in SiC Boules Grown by PVT

Authors: Seoyong Ha, N.T. Nuhfer, M. De Graef, Gregory S. Rohrer, Marek Skowronski

477

Structural Characterization of Silicon Carbide Etched by Using a Combination of Ion Implantation and Wet Chemical Etching

Authors: T. Henkel, Gabriel Ferro, Shin Ichi Nishizawa, H. Pressler, Yasuhito Tanaka, Hisao Tanoue, Naoto Kobayashi

481

Polytype and Defect Control of Two Inch Diameter Bulk SiC

Authors: Makato Sasaki, Hiromu Shiomi, Hiroshi Harima, Shigehiro Nishino

485

Correlation of EBIC and SWBXT Imaged Defects and Epilayer Growth Pits in 6H-SiC Schottky Diodes

Authors: C.M. Schnabel, M. Tabib-Azar, Philip G. Neudeck, S.G. Bailey, H.B. Su, Michael Dudley, R.P. Raffaelle

489