Materials Science Forum Vols. 389-393

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393

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Table of Contents

Paper Title Page

Growth and Electrical Characterization of the Lightly-Doped Thick 4H-SiC Epilayers

Authors: Hidekazu Tsuchida, Isaho Kamata, Tamotsu Jikimoto, Kunikaza Izumi

171

Fast Epitaxial Growth of 4H-SiC by Chimney-Type Hot-Wall CVD

Authors: Keiko Fujihira, Tsunenobu Kimoto, Hiroyuki Matsunami

175

High-Rate Epitaxial Growth of 4H-SiC Using a Vertical-Type, Quasi-Hot-Wall CVD Reactor

Authors: Koh Masahara, Tetsuo Takahashi, Mitsuhiro Kushibe, Takaya Ohno, Johji Nishio, Kazutoshi Kojima, Yuuki Ishida, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

179

Fast Growth and Doping Characteristics of α-SiC in Horizontal Cold-Wall Chemical Vapor Deposition

Authors: Shun-ichi Nakamura, Tsunenobu Kimoto, Hiroyuki Matsunami

183

Highly Uniform Epitaxial SiC-Layers Grown in a Hot-Wall CVD Reactor with Mechanical Rotation

Authors: Adolf Schöner, Andrey O. Konstantinov, S. Karlsson, R. Berge

187

Growth Characteristics of SiC in a Hot-Wall CVD Reactor with Rotation

Authors: Jie Zhang, Urban Forsberg, M. Isacson, Alexsandre Ellison, Anne Henry, Olof Kordina, Erik Janzén

191

Epitaxial Growth of (11-20) 4H-SiC Using Substrate Grown in the [11-20] Direction

Authors: Kazutoshi Kojima, Takaya Ohno, Junji Senzaki, Kenji Fukuda, Tatsuo Fujimoto, Masakazu Katsuno, Noboru Ohtani, Johji Nishio, Koh Masahara, Yuuki Ishida, Tetsuo Takahashi, Takaya Suzuki, Tomoyuki Tanaka, Sadafumi Yoshida, Kazuo Arai

195

Hot-Wall CVD Growth of 4H-SiC Using Si₂Cl₆+C₃H₈+H₂ System

Authors: Toshiyuki Miyanagi, Shigehiro Nishino

199

Aluminum Doping of Epitaxial Silicon Carbide Grown by Hot-Wall CVD; Effect of Process Parameters

Authors: Urban Forsberg, Örjan Danielsson, Anne Henry, Margareta K. Linnarsson, Erik Janzén

203

Aluminum Incorporation into 4H-SiC Layers during Epitaxial Growth in a Hot-Wall CVD System

Authors: Günter Wagner, W. Leitenberger, K. Irmscher, Frank Schmid, Michael Laube, Gerhard Pensl

207