Materials Science Forum Vols. 389-393

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393

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Paper Title Page

Homoepitaxial 'Web Growth' of SiC to Terminate C-Axis Screw Dislocations and Enlarge Step-Free Surfaces

Authors: Philip G. Neudeck, J. Anthony Powell, Andrew J. Trunek, David J. Spry, Glenn M. Beheim, Emye Benavage, Phillip B. Abel, William M. Vetter, Michael Dudley

251

Formation of Epitaxial Mesa Structures on 4H-SiC (0001) and (11-20) Substrates

Authors: Yi Chen, Tsunenobu Kimoto, Yuuichi Takeuchi, Hiroyuki Matsunami

255

Characteristics of Boron in 4H-SiC Layers Produced by High-Temperature Techniques

Authors: A. Kakanakova-Georgieva, Rositza Yakimova, Jie Zhang, L. Storasta, Mikael Syväjärvi, Erik Janzén

259

Epitaxial Growth of 4H-SiC with Hexamethyldisilane HMDS

Authors: C. Sartel, Véronique Soulière, Jacques Dazord, Yves Monteil, I. El Harrouni, Jean Marie Bluet, Gérard Guillot

263

Homoepitaxial Growth of 4H-SiC on Porous Substrate Using Bis-Trimethylsilylmethane Precursor

Authors: Jae Kyeong Jeong, Myung Yoon Um, Hoon Joo Na, Bum Seok Kim, In Bok Song, Hyeong Joon Kim

267

TEM (XHREM) and EDX Studies of 6H-SiC Porous Layer as a Substrate for Subsequent Homoepitaxial Growth

Authors: L.M. Sorokin, John L. Hutchison, Jeremy Sloan, G.N. Mosina, N.S. Savkina, V.B. Shuman, Alexander A. Lebedev

271

3C-SiC(100) Homoepitaxial Growth by Chemical Vapor Deposition and Schottky Barrier Junction Characteristics

Authors: Yuuki Ishida, Mitsuhiro Kushibe, Tetsuo Takahashi, Hajime Okumura, Sadafumi Yoshida

275

Homoepitaxial Growth of Cubic Silicon Carbide by Sublimation Epitaxy

Authors: Tomoaki Furusho, Toshiyuki Miyanagi, Yoichi Okui, Satoru Ohshima, Shigehiro Nishino

279

Impact of the Initial Surface Conditions on Defect Appearance in 4H-SiC Epilayers

Authors: Rositza Yakimova, Henrik Jacobsson, Mikael Syväjärvi, A. Kakanakova-Georgieva, T. Iakimov, Charíya Virojanadara, Leif I. Johansson, Erik Janzén

283

Effect of the Si Droplet Size on the VLS Growth Mechanism of SiC Homoepitaxial Layers

Authors: Gabriel Ferro, Didier Chaussende, François Cauwet, Yves Monteil

287