Electrical Characterization of Semi-Insulating 6H-SiC Substrates

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Periodical:

Materials Science Forum (Volumes 457-460)

Edited by:

Roland Madar, Jean Camassel and Elisabeth Blanquet

Pages:

669-672

Citation:

E. M. Sanchez et al., "Electrical Characterization of Semi-Insulating 6H-SiC Substrates", Materials Science Forum, Vols. 457-460, pp. 669-672, 2004

Online since:

June 2004

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