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Contribution of X-Ray Diffraction Simulations to Experimental Study of High Energy He Implantation at High Dose in 4H-SiC at Room Temperature
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Visible Light Laser Irradiation: a Tool for Implantation Damage Reduction
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SiC-Based Current Limiter Devices
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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460Visible Light Laser Irradiation: a Tool for...

Visible Light Laser Irradiation: a Tool for Implantation Damage Reduction

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Silicon Carbide and Related Materials 2003

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Periodical:

Materials Science Forum (Volumes 457-460)

Pages:

941-944

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460.941

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Online since:

June 2004

Authors:

Jean Camassel, Hervé Peyre, D.J. Brink, Marcin Zielinski, Servane Blanqué, Narcis Mestres, Philippe Godignon

Keywords:

6H-SiC, Implantation Damage, Nitrogen Doping, Visible Light Laser Irradiation

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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