Materials Science Forum Vols. 457-460

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https://doi.org/10.4028/www.scientific.net/MSF.457-460

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Paper Title Page

Substrate Bias Amplification of a SiC Junction Field Effect Transistor with a Catalytic Gate Electrode

Authors: Shinji Nakagomi, M. Takahashi, Y. Kokubun, Lars Unéus, Susan Savage, H. Wingbrant, Mike Andersson, Ingemar Lundström, M. Löfdahl, Anita Lloyd Spetz

1507

Development of 3C-SiC SOI Structures using Si on Polycrystalline SiC Wafer Bonded Substrates

Authors: Rachael L. Myers-Ward, Stephen E. Saddow, Shailaja P. Rao, Karl D. Hobart, M. Fatemi, Francis J. Kub

1511

Formation of 3C-SiC Films Embedded in SiO₂ by Sacrificial Oxidation

Authors: D. Panknin, Philippe Godignon, Narcis Mestres, Efstathios K. Polychroniadis, J. Stoemenos, Gabriel Ferro, Joerg Pezoldt, Wolfgang Skorupa

1515

Young's Modulus and Residual Stress of Polycrystalline 3C-SiC Films Grown by LPCVD and Measured by the Load-Deflection Technique

Authors: Xiao An Fu, J. Dunning, Christian A. Zorman, Mehran Mehregany

1519

Characterization of Polycrystalline SiC Thin Films for MEMS Applications using Surface Micromachined Devices

Authors: J. Dunning, Xiao An Fu, Srihari Rajgopal, Mehran Mehregany, Christian A. Zorman

1523

Reaction Bonding of Microstructured Silicon Carbide using Polymer and Silicon Thin Film

Authors: K. Rajanna, S. Tanaka, Toshio Itoh, Masayoshi Esashi

1527

Fabrication of Suspended Nanomechanical Structures from Bulk 6H-SiC Substrates

Authors: X.M.H. Huang, X.L. Feng, M.K. Prakash, S. Kumar, Christian A. Zorman, Mehran Mehregany, M.L. Roukes

1531

Sublimation Growth of Bulk AlN Crystals: Process Temperature and Growth Rate

Authors: Boris M. Epelbaum, Matthias Bickermann, Albrecht Winnacker

1537

Structural, Optical and Electrical Properties of Bulk AlN Crystals Grown by PVT

Authors: Matthias Bickermann, Boris M. Epelbaum, Albrecht Winnacker

1541

Experimental and Theoretical Analysis of Sublimation Growth of Bulk AlN Crystals

Authors: E.N. Mokhov, S.N. Smirnov, A.S. Segal, D. Bazarevskiy, Yuri Makarov, M.G. Ramm, Heikki Helava

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