Advances in Nanomaterials and Processing

Volumes 124-126

doi: 10.4028/

Paper Title Page

Authors: R. Navamathavan, Anvar Zakirov, Hyun Seung Kim, Yong Jun Jang, An Soo Jung, Chi Kyu Choi

Abstract: Low dielectric constant SiOC(-H) films were deposited on p-type Si (100) substrates by plasma enhanced chemical vapor deposition (PECVD)...

Authors: Jun Hyung Lim, Seok Hern Jang, Seung Yi Lee, Kyung Min Yoon, Kyu Tae Kim, Jin Ho Joo, Hoo Jeong Lee, Hee Gyoun Lee, Gye Won Hong

Abstract: We fabricated by metal organic deposition (MOD) using trifluoroacetic acid (TFA) via the “211 process”, and then evaluated the phase...

Authors: Won Jun Lee, Min Ho Chun, Kwang Su Cheong, Kwang Chol Park, Chong Ook Park, Guo Zhong Cao, Sa Kyun Rha

Abstract: SiO2 films were prepared by atomic layer deposition (ALD) technique, and their physical and electrical properties were characterized for...

Authors: Sang Heon Lee

Abstract: Electro-deposition of carbon film on silicon substrate in methanol solution was carried out with various current density, solution...

Authors: Tae Woo Lee, Chan Soo Shin, Kae Myung Kang

Abstract: We have studied on the wear behavior of Cu-TiB2 composites, produced by thermal extraction, as a function of dispersed particle sizes and...

Authors: Jae Hong Jeon, Kang Woong Lee

Abstract: We investigated the effect of amorphous silicon pattern design regarding to light induced leakage current in amorphous silicon thin film...

Authors: Nam Hoon Kim, Gwon Woo Choi, Yong Jin Seo, Woo Sun Lee

Abstract: Indium tin oxide (ITO) CMP was performed by change of de-ionized water (DIW) temperature in pad conditioning process. DIW with high...

Authors: Nam Hoon Kim, Dong Myong Na, Pil Ju Ko, Jin Seong Park, Woo Sun Lee

Abstract: Chemical mechanical polishing (CMP) of platinum thin films was performed for the improvement of surface morphology. Platinum thin films...

Authors: Jong Hyeuk Lim, Kyong Nam Kim, Geun Young Yeom

Abstract: An internal linear inductive antenna referred to as “double comb-type antenna” was used for a large-area plasma source with the substrate...

Authors: Byoung Jae Park, Kyoung Seok Min, Sang Duk Park, Jeong Woon Bae, Oleksiy Vozniy, Geun Young Yeom

Abstract: The energy and the flux of the ion gun with a three-grid system was compared with those of the ion gun with a two-grid system and the...


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