Advances in Nanomaterials and Processing

Volumes 124-126

doi: 10.4028/

Paper Title Page

Authors: Chan Ki Yang, Jin Goo Park, Jung Hun Jo, Geun Sik Lim, Tae Hyung Kim, In Soo Jo

Abstract: One of key processes in tungsten (W) CMP is to remove slurry particles inside W plug after CMP. In general, HF cleaning is well known to...

Authors: Seung Hwan Yi, Man Soon Yoon, Soon Chul Ur

Abstract: This paper describes a micromachined piezoelectric bimorph microphone, which is built on a low stress Parylene diaphragm with high quality...

Authors: Ju Yeoul Baek, Gu Han Kwon, Jeong Yun Kim, Jin Ho Cho, Seung Ha Lee, Kyung Sun, Sang Hoon Lee

Abstract: PDMS(polydimethylsiloxane) is a flexible and biocompatible material and is widely used in bio- or medical-related fields. Recently, PDMS...

Authors: Jong Jin Choi, Joo Hee Jang, Dong Soo Park, Byung Dong Hahn, Woon Ha Yoon, Chan Park

Abstract: Lead zinc niobate (PZN) added lead zirconate titanate (PZT) thick films with thickness of 5~10 μm were fabricated on silicon and sapphire...

Authors: Dong Wan Kim, Kug Sun Hong

Abstract: For low temperature cofired ceramic (LTCC) materials to achieve increase functionality, as well as low loss and moderate dielectric...

Authors: Jang Sik Lee, Q.X. Jia

Abstract: To investigate the anisotropic dielectric properties of layer-structured bismuth-based ferroelectrics along different crystal directions,...

Authors: Mikinori Ito, Kazuaki Sawada, Makoto Ishida

Abstract: Epitaxial Pt films were grown on γ-Al2O3/Si (111) substrate by RF-magnetron sputtering. The γ-Al2O3 buffer layers were grown epitaxially...

Authors: Jin Heong Yim, Young Kwon Park, Jong Ki Jeon

Abstract: The porous SSQ (silsesquioxane) films were prepared by using alkoxy silyl substituted cyclodextrin (sCD) and methyl substituted...

Authors: Nam Ihn Cho, Se Jong Lee, Yo Seung Song, Deuk Yong Lee
Authors: Bum Rae Cho

Abstract: Indium tin oxide (ITO) used in many applications such as electronic and optical devices were deposited on the soda lime glass substrate by...


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