Gettering and Defect Engineering in Semiconductor Technology VIII
Solid State Phenomena Volumes 69 - 70
doi:10.4028/www.scientific.net/SSP.69-70
-
p149
Equilibrium Critical Thickness of Strained Buried SiGe Layers
[
256 K
]
Authors: A. Fischer, G. Kissinger, Hans Richter, P. Zaumseil
-
p155
Improved Microwave Absorption Technique for Bulk and Surface Lifetime Analysis in Processed Si Wafers
[
288 K
]
Authors: Eugenijus Gaubas, Eddy Simoen, C. Claeys, A. Poyai
-
p161
Defect Control in Nitrogen Doped Czochralski Silicon Crystals
[
461 K
]
Authors: Atsushi Ikari, Katsuhiko Nakai, Y. Tachikawa, H. Deai, Y. Hideki, Yasumitsu Ohta, Naoya Masahashi, S. Hayashi, T. Hoshino, Wataru Ohashi
-
p167
Growth and Characteristics of Low Trap Density Ultrathin [4-7 nm] Gate Oxides for SiGe Quantum Well MOS Structures
[
255 K
]
Authors: S. Kar, P. Zaumseil
-
p173
Interaction of Crystal Defects with p-n Junctions in Multicrystalline Si Solar Cells
[
553 K
]
Authors: O. Krüger, Martin Kittler, C. Häßler, Wolfgang Koch
-
p179
Interaction between Point Defects and Dislocations in SiGe
[
619 K
]
Authors: Klara Lyutovich, F. Ernst, Erich Kasper, Monika Bauer, Michael Oehme
-
p185
Radiation Induced Defect Levels in Highly Doped n-Type Si1-xGex Strained Layers
[
366 K
]
Authors: Edouard V. Monakhov, Andrej Yu. Kuznetsov, H.H. Radamson, Bengt G. Svensson
-
p191
ESR Investigations of Modulation-Doped Si/SiGe Quantum Wells
[
251 K
]
Authors: N. Sandersfeld, W. Jantsch, Zbysław Wilamowski, Friedrich Schäffler
-
p197
Shallower Thermal Donor and Nitrogen-Oxygen Complex in Nitrogen Doped Czochralski Silicon
[
205 K
]
Authors: De Ren Yang, Jie Zhang, L. Li, Duan Lin Que
-
p203
X-Ray Diffraction Studies of the Influence of Substitutional Carbon on Si/Ge Interdiffusion in SiGe/Si Superlattices
[
321 K
]
Authors: P. Zaumseil, H. Rücker
-
p209
Radiation Defects Formation in Si
[
304 K
]
Authors: Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder
-
p215
Oxygen and Peculiarities of its Precipitation in Si
[
252 K
]
Authors: Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin, Nikolay V. Abrosimov, M. Höhne, W. Schröder
-
p221
The Peculiarities of a Non-Stationary Growth Kinetics in GSMBE and their Influence on Si/ Si1-xGex Interfaces Abruptness
[
267 K
]
Authors: L.K. Orlov, A.V. Potapov, S.V. Ivin
-
p229
Vacancy-Gettering in Silicon: Cavities and Helium-Implantation
[
389 K
]
Authors: F. Corni, R. Tonini, S. Frabboni, C. Nobili, G. Calzolari, S. Masetti, P. Tamarozzi, Giuseppe Pavia, G.F. Cerofolini
-
p235
Gettering Centres for Metals and Oxygen Formed in MeV-Ion-Implanted and Annealed Silicon
[
346 K
]
Authors: Reinhard Kögler, A. Peeva, W. Anwand, P. Werner, A.B. Danilin, Wolfgang Skorupa