Ultra Clean Processing of Silicon Surfaces VII

Volumes 103-104

doi: 10.4028/www.scientific.net/SSP.103-104

Paper Title Page

Authors: Twan Bearda, Ief Vander Mot, Kristel Van den Broeck, Nausikaä Van Hoornick, Jan Van Hoeymissen, Paul W. Mertens
269
Authors: Yi Koan Hong, Ja Hyung Han, Jin Hyung Lee, Jin Goo Park, Ahmed A. Busnaina

Abstract: The adhesion force and removal of alumina particles on Cu, Ta, TEOS, SILKTM, Aurora and FSG wafer surfaces were experimentally and...

275
Authors: Kai Dong Xu, Rita Vos, Guy Vereecke, G. Doumen, Wim Fyen, Paul W. Mertens, Marc M. Heyns, Chris Vinckier, Jan Fransaer
279
Authors: S. Tamilmani, V. Lowalekar, Srini Raghavan, Robert Small
283
Authors: C. Gabrielli, C. Mace, J. Matha, S. Mège, E. Ostermann, H. Perrot

Abstract: In the microelectronic industry using the damascene process, dendritic growth is observed on some parts of the circuits in critical...

287
Authors: Daniel A. Koos, Julia Svirchevski, Daniel J. Vitkavage, David G. Hansen, Karen A. Reinhardt, Frank Huang, Marie Mitchel, Guang Ying Zhang
291
Authors: Atsushi Okuyama, Kazumi Asada, Hitoshi Abe, Hayato Iwamoto, Yoshio Okamoto, Takuya Wada
297
Authors: Olivier Louveau, Emile Lajoinie, Olivier Pollet, Jean Philippe Odet, Sylviane Cêtre, Laurent Lachal, Béatrice Icard, Evelyne Tabouret, Marc Veillerot, Hervé Fontaine, Didier Louis
301
Authors: Teruo Haibara, Kenichi Uemura, Takio Adachi
305
Authors: H. Vankerckhoven, F. De Smedt, K. Vandersmissen, Martine Claes, Stefan De Gendt, Marc M. Heyns, Chris Vinckier
309

Showing 61 to 70 of 87 Paper Titles