Ultra Clean Processing of Silicon Surfaces VII

Volumes 103-104

doi: 10.4028/www.scientific.net/SSP.103-104

Paper Title Page

Authors: S. Metzger, Bernd O. Kolbesen

Abstract: The suitability of high performance liquid chromatography (HPLC) for the direct determination of the concentration of complexing agents for...

221
Authors: Maria Luisa Polignano, Daniele Caputo, F. Cerutti, M. Cottini, L. Farini, J. Reffle
227
Authors: Toru Umeda, Shuichi Tsuzuki, Ryouji Kokuun, Kazuko Yoneda
233
Authors: Joon Bum Shim, Kang Hyun Lee, Kee Ho Kim, Heung Soo Park

Abstract: When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between...

237
Authors: Rita Vos, Els Kesters, Sylvain Garaud, R. De Waele, Karine Kenis, Marcel Lux, H. Kraus, James Snow, Denis Shamiryan, Gabriela Catana, W. Deweerd, T. Schram, S. DeGendt, Paul W. Mertens

Abstract: In this work the removal of different metallic and particulate contaminants relevant for high-k/metal gate processing is studied. Best...

241
Authors: Hajime Ugajin, Hayato Iwamoto, Kei Kinoshita
245
Authors: Lucile Broussous, Pascal Besson, M.M. Frank, D. Bourgeat

Abstract: In this study, we used an SEZ single-wafer spin-processor to develop a single backside cleaning solution able to remove any metallic or...

249
Authors: Atsushi Hidaka, Satoru Yamashita, Naoki Tanahashi, Hidekazu Ishii, Masafumi Kitano, Yasuyuki Shirai, Tadahiro Ohmi
255
Authors: Yukio Hashimoto, Mutsuhiro Amari, Makoto Komatsu, Kunio Fujiwara
265

Showing 51 to 60 of 87 Paper Titles