Ultra Clean Processing of Silicon Surfaces VII
Paper Title Page
Abstract: The suitability of high performance liquid chromatography (HPLC) for the direct determination of the concentration of complexing agents for...
Abstract: When the integration of Cu process and non-Cu process is mixed in the fabrication, the prevention of Cu cross-contamination between...
Abstract: In this work the removal of different metallic and particulate contaminants relevant for high-k/metal gate processing is studied. Best...
Abstract: In this study, we used an SEZ single-wafer spin-processor to develop a single backside cleaning solution able to remove any metallic or...