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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84

Solid State Phenomena Vols. 82-84

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84

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Paper Title Page

Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing

Authors: Timo Müller, G. Obermeier, T. Bearda, A. Huber, R. Schmolke, Wilfried von Ammon, Wilfried Lerch

127

Hydrogen Interaction with Transition Metals in Silicon, Studied by Electron Paramagnetic Resonance

Authors: P.T. Huy, C.A.J. Ammerlaan

133

Raman Spectroscopic Analysis of Hydrogen Plasma Treated Czochralski Silicon

Authors: Reinhart Job, Alexander G. Ulyashin, Wolfgang R. Fahrner

139

Nitrogen Effect on Hydrogen Penetration into Cz Si during Wet Chemical Etching

Authors: A.L. Parakhonsky, Eugene B. Yakimov, De Ren Yang

145

Hydrogen-Related Defects in High-Resistivity Silicon

Authors: O.A. Soltanovich, Olga V. Feklisova, Eugene B. Yakimov

150

Infra Red Absorption by Hydrogen-Passivated Cracks in Silicon

Authors: D.V. Kilanov, L.N. Safronov, V.P. Popov

155

Atomistic Study of Boron Clustering in Silicon

Authors: Paola Alippi, Paolo Ruggerone, Luciano Colombo

163

Self-Interstitial Kinetics and Transient Phenomena in Si Crystals

Authors: Antonino La Magna, Salvatore Coffa, Sebania Libertino, Matthias Strobel, Luciano Colombo

171

Dependence of the Transient Enhanced Diffusion, of B in Si, upon B Concentration and Ion Implanted Dose

Authors: Sandro Solmi, G. Mannino, Marco Servidori, M. Bersani, L. Mancini, S. Milita, Vittorio Privitera, M. Anderle

177

Interstitial Diffusion Influence upon Two-Dimensional Boron Profiles

Authors: Filippo Giannazzo, Vito Raineri, Vittorio Privitera, F. Priolo

183

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