Main Theme:

Gettering and Defect Engineering in Semiconductor Technology X

Volumes 95 - 96
doi: 10.4028/www.scientific.net/SSP.95-96
Paper Titles published in this Main Theme:
Paper Title Page

Smart-Cut Process for Ultrathin SOI Wafers Manufacturing

Authors: Christophe Maleville

1

Investigation of Crystal Defects in Epitaxial Layers on Nitrogen-Doped Substrates and a Method for their Suppression

Authors: Katsuhiko Nakai, Koichi Kitahara, Yasumitsu Ohta, Atsushi Ikari, Masahiro Tanaka

11

Defect Formation in Heavily As-Doped Cz Si

Authors: S. Rouvimov, R. Kuytt, J. Kearns, V. Todt, B. Orschel, H. Siriwardane, A. Buczkowski, I. Shul'pina, George A. Rozgonyi

17

Recrystallization of Silicon on Insulator Layers Implanted with High Doses of Hydrogen Ions

Authors: Ida E. Tyschenko, A.B. Talochkin, Anton K. Gutakovskii, V.P. Popov

23

Laser Crystallization of Thin a-Si Films on Plastic Substrates Using Excimer Laser Treatments

Authors: M.D. Efremov, Vladimir A. Volodin, Liudmila I. Fedina, Anton K. Gutakovskii, D.V. Marin, S.A. Kochubei, A.A. Popov, Yu. A. Minakov, V.N. Ulasyuk

29

Predicting Material Parameters for Intrinsic Point Defect Diffusion in Silicon Crystal Growth

Authors: Michael Griebel, Lukas Jager, Axel Voigt

35

Dislocation Locking in Silicon by Oxygen and Oxygen Transport at Low Temperatures

Authors: Semih Senkader, A. Giannattasio, Robert J. Falster, Peter R. Wilshaw

43

Effect of Electron Irradiation on Thermal Donors in Oxygen-Doped High-Resistivity FZ Si

Authors: K. Takakura, H. Ohyama, T. Yoshida, Hidekazu Murakawa, J.M. Rafí, Reinhart Job, Alexander G. Ulyashin, Eddy Simoen, C. Claeys

53

Investigations of the Effect of High Pressure on the Annealing Behavior of Oxygen Related Defects in Silicon

Authors: Charalamos A. Londos, M.S. Potsidi, Andrzej Misiuk, Jadwiga Bak-Misiuk, Artem Shalimov, Valentin V. Emtsev

59

Simulation of Oxygen Contaminated Silicon Grain Boundaries in Cluster Approximation

Authors: Alex L. Pushkarchuk, A.K. Fedotov, S.A. Kuten

65

Showing 1 to 10 of 96 Paper Titles