Gettering and Defect Engineering in Semiconductor Technology X
| Paper Title | Page |
|---|---|
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Smart-Cut Process for Ultrathin SOI Wafers Manufacturing Authors: Christophe Maleville |
1 |
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Authors: Katsuhiko Nakai, Koichi Kitahara, Yasumitsu Ohta, Atsushi Ikari, Masahiro Tanaka |
11 |
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Defect Formation in Heavily As-Doped Cz Si Authors: S. Rouvimov, R. Kuytt, J. Kearns, V. Todt, B. Orschel, H. Siriwardane, A. Buczkowski, I. Shul'pina, George A. Rozgonyi |
17 |
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Recrystallization of Silicon on Insulator Layers Implanted with High Doses of Hydrogen Ions Authors: Ida E. Tyschenko, A.B. Talochkin, Anton K. Gutakovskii, V.P. Popov |
23 |
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Laser Crystallization of Thin a-Si Films on Plastic Substrates Using Excimer Laser Treatments Authors: M.D. Efremov, Vladimir A. Volodin, Liudmila I. Fedina, Anton K. Gutakovskii, D.V. Marin, S.A. Kochubei, A.A. Popov, Yu. A. Minakov, V.N. Ulasyuk |
29 |
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Predicting Material Parameters for Intrinsic Point Defect Diffusion in Silicon Crystal Growth Authors: Michael Griebel, Lukas Jager, Axel Voigt |
35 |
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Dislocation Locking in Silicon by Oxygen and Oxygen Transport at Low Temperatures Authors: Semih Senkader, A. Giannattasio, Robert J. Falster, Peter R. Wilshaw |
43 |
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Effect of Electron Irradiation on Thermal Donors in Oxygen-Doped High-Resistivity FZ Si Authors: K. Takakura, H. Ohyama, T. Yoshida, Hidekazu Murakawa, J.M. Rafí, Reinhart Job, Alexander G. Ulyashin, Eddy Simoen, C. Claeys |
53 |
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Authors: Charalamos A. Londos, M.S. Potsidi, Andrzej Misiuk, Jadwiga Bak-Misiuk, Artem Shalimov, Valentin V. Emtsev |
59 |
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Simulation of Oxygen Contaminated Silicon Grain Boundaries in Cluster Approximation Authors: Alex L. Pushkarchuk, A.K. Fedotov, S.A. Kuten |
65 |
