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HomeMaterials Science ForumMaterials Science Forum Vols. 338-342

Materials Science Forum Vols. 338-342

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.338-342

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Table of Contents

Paper Title Page

Anisotropy of Inversion Channel Mobility in 4H- and 6H-SiC MOSFETs on (11-20) Face

Authors: Hiroshi Yano, Toshio Hirao, Tsunenobu Kimoto, Hiroyuki Matsunami, Katsunori Asano, Yoshitaka Sugawara

1105

MOSFET Performance of 4H-, 6H-, and 15R-SiC Processed by Dry and Wet Oxidation

Authors: Hiroshi Yano, Tsunenobu Kimoto, Hiroyuki Matsunami, M. Bassler, Gerhard Pensl

1109

Interface Trap Profiles Near the Band Edges in 6H-SiC MOSFETs

Authors: N.S. Saks, S.S. Mani, Anant K. Agarwal

1113

Characterization of SiC MOS Structures using Conductance Spectroscopy and Capacitance Voltage Analysis

Authors: E.Ö. Sveinbjörnsson, M. Ahnoff, H.Ö. Ólafsson

1117

Mobility in 6H-SiC n-Channel MOSFETs

Authors: Charles Scozzie, Aivars J. Lelis, F. Barry McLean

1121

Effects of Oxidation Conditions on the Concentration of Carbon Dangling Bonds in Oxidized 6H-SiC

Authors: P.J. Macfarlane, Mary Ellen Zvanut

1125

Effects of Steam Annealing on Electrical Characteristics of 3C-SiC Metal-Oxide-Semiconductor Structures

Authors: Masahito Yoshikawa, Kazutoshi Kojima, Takeshi Ohshima, Hisayoshi Itoh, Sohei Okada, Yuuki Ishida

1129

Atomic-Scale Engineering of the SiC-SiO₂ Interface

Authors: Sokrates T. Pantelides, G. Duscher, M. Di Ventra, Ryszard Buczko, K. McDonald, M.B. Huang, Robert A. Weller, Israel J.R. Baumvol, Fernanda Chiarello Stedile, C. Radtke, S.J. Pennycook, G.Y. Chung, Chin Che Tin, John R. Williams, J.H. Won, Leonard C. Feldman

1133

Comparison of High-Temperature Electrcial Characterizations of Pulsed-Laser Deposited AIN on 6H- and 4H-SiC from 25 to 450°C

Authors: Aivars J. Lelis, Charles Scozzie, F. Barry McLean, Bruce Geil, R.D. Vispute, T. Venkatesan

1137

Molding-based Thin Film Patterning Techniques for SiC Surface Micromachining

Authors: Xiao Yan Song, S. Guo, Christian A. Zorman, Chien-Hung Wu, A.A. Yasseen, Mehran Mehregany

1141