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HomeMaterials Science ForumMaterials Science Forum Vols. 389-393

Materials Science Forum Vols. 389-393

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.389-393

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Paper Title Page

Improving 4H-SiC/SiO₂ Interface Properties by Depositing Ultra-Thin Si Nitride Layer Prior to Formation of SiO₂ and Annealing

Authors: Xie Wen Wang, H.M. Bu, B.L. Laube, C. Caragianis-Broadbridge, T.P. Ma

993

Improvement of SiO₂/α-SiC Interface Properties by Nitrogen Radical Treatment

Authors: Yusuke Maeyama, Hiroshi Yano, Tomoaki Hatayama, Yukiharu Uraoka, Takashi Fuyuki, T. Shirafuji

997

New Evidence of Interfacial Oxide Traps in n-Type 4H- and 6H-SiC MOS Structures

Authors: H.Ö. Ólafsson, E.Ö. Sveinbjörnsson, T.E. Rudenko, V.I. Kilchytska, I.P. Tyagulski, I.N. Osiyuk

1001

On Shallow Interface States in n-Type 4H-SiC Metal-Oxide-Semiconductor Structures

Authors: H.Ö. Ólafsson, Fredrik Allerstam, E.Ö. Sveinbjörnsson

1005

Effects of Successive Annealing of Oxides on Electrical Characteristics of Silicon Carbide Metal-Oxide-Semiconductor Structures

Authors: Masahito Yoshikawa, Mirei Satoh, Takeshi Ohshima, Hisayoshi Itoh

1009

The Investigation of 4H-SiC/SiO₂ Interfaces by Optical and Electrical Measurements

Authors: Yuuki Ishida, Tetsuo Takahashi, Hajime Okumura, Tamotsu Jikimoto, Hidekazu Tsuchida, Masahito Yoshikawa, Yuichi Tomioka, M. Midorikawa, Yasuto Hijikata, Sadafumi Yoshida

1013

Characteristics of Mobile Ions in the SiO₂ Films of SiC-MOS Structures

Authors: Seong Joo Jang, H.J. Song, K.Y. Oh, K.H. Lee, Y.J. Lim, Nam Ihn Cho

1017

Abnormal Hysteresis Property of SiC Oxide C-V Characteristics

Authors: Jae Seung Choi, Weon Seon Lee, Dong Hyun Shin, Hyung Gyoo Lee, Yeong Seuk Kim, Keun Hyung Park

1021

ESR Characterization of SiC Bulk Crystals and SiO₂/SiC Interface

Authors: Junichi Isoya, Ryouji Kosugi, Kenji Fukuda, Satoshi Yamasaki

1025

Characterization of the Interfaces between SiC and Oxide Films by Spectroscopic Ellipsometry

Authors: Yuichi Tomioka, T. Iida, M. Midorikawa, H. Tukada, K. Yoshimoto, Yasuto Hijikata, Hiroyuki Yaguchi, Masahito Yoshikawa, Yuuki Ishida, Ryouji Kosugi, Sadafumi Yoshida

1029