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Vols. 457-460

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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460

Materials Science Forum Vols. 457-460

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460

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Table of Contents

Paper Title Page

Stress Control in 3C-SiC Films Grown on Si(111)

Authors: Charbel Zgheib, Pierre M. Masri, Petia Weih, Oliver Ambacher, Joerg Pezoldt

301

Development of a High-Throughput LPCVD Process for Depositing Low Stress Poly-SiC

Authors: Xiao An Fu, J. Dunning, Christian A. Zorman, Mehran Mehregany

305

Low Temperature ECR-PECVD Microcrystalline SiC Growth by Pulsed Gas Flows

Authors: M.J. Hernández, M. Cervera, J. Piqueras, T. del Caño, J. Jiménez

309

Investigation of Thick 3C-SiC Films Re-Grown on Thin 35 nm "Flash Lamp Annealed" 3C-SiC Layers

Authors: Gabriel Ferro, D. Panknin, J. Stoemenos, Carole Balloud, Jean Camassel, Efstathios K. Polychroniadis, Yves Monteil, Wolfgang Skorupa

313

Low Temperature (320°C) Deposition of Hydrogenated Microcrystalline Cubic Silicon Carbide Thin Films

Authors: S. Miyajima, A. Yamada, Makoto Konagai

317

Effect of Carbonization in Bias-Enhanced Nucleation Step during Highly-Oriented Growth of Diamond Films on 6H-SiC(0001) Substrate

Authors: Soo Hyung Seo, T.H. Lee, J.S. Park, Joon Suk Song, Myung Hwan Oh

321

Formation of SiC/Si Multilayer Structures on Si(100) by Supersonic Free Jets of Single Gas Source CH₃SiH₃

Authors: Yoshifumi Ikoma, R. Ohtani, Teruaki Motooka

325

Growth of SiC Nanorods and Microcrystals by Carbon Nanotubes-Confined Reaction

Authors: Md. Shajahan, Y.H. Mo, Kee Suk Nahm

329

Modelling and Regrowth Mechanisms of Flashlamp Processing of SiC-on-Silicon Heterostructures

Authors: M. Smith, R.A. McMahon, M. Voelskow, Wolfgang Skorupa, J. Stoemenos

333

Structural Defects in SiC Crystals Investigated by High Energy X-Ray Diffraction

Authors: Matthias Weisser, Christoph Seitz, Peter J. Wellmann, Rainer Hock, Andreas Magerl

339