Gettering and Defect Engineering in Semiconductor Technology XIII

Volumes 156-158

doi: 10.4028/

Paper Title Page

Authors: Tatsuhiko Aoki, Hiroaki Kariyazaki, Koji Sueoka, Kouji Izunome

Abstract: We have investigated the gettering efficiency at the interface of Si (110) and Si (100) directly bonded (DSB) substrates. DSB substrates...

Authors: Reinhard Kögler, Christiane Dubois, Jürgen W. Gerlach, H. Hutter, A. Mücklich, Wolfgang Skorupa

Abstract: Implantation of 18O into highly B-doped and undoped silicon provides the possibility to investigate the effect of B-doping and to...

Authors: Abdelazize Laades, K. Lauer, C. Maier, D. Alber, M. Bähr, J. Nutsch, J. Lossen, A. Lawerenz

Abstract: We investigated the impact of using low quality feedstock such as recycled silicon and simplified pulling condition on the performance of...

Authors: Jasmin Hofstetter, Jean F. Lelièvre, Carlos del Cañizo, Antonio Luque

Abstract: The e ect of slow cooling after di erent high temperature treatments on the in- terstitial iron concentration and on the electron lifetime...

Authors: Ville Vähänissi, Antti Haarahiltunen, H. Talvitie, M.I. Asghar, Marko Yli-Koski, Hele Savin

Abstract: Low temperature boron and phosphorous diffusion gettering (BDG and PDG) of iron in Czochralski-grown silicon were experimentally studied....

Authors: D.B. Shustov, E.V. Kolesnikova, Evgenia V. Kalinina, V.A. Skuratov, M.V. Zamoryanskaya

Abstract: Defects distribution in 6H-SiC implanted with Bi ions was investigated with the local cathodoluminescence. There are two typical areas with...

Authors: Martin C. Schubert, Holger Habenicht, Michael J. Kerler, Wilhelm Warta

Abstract: Iron concentration imaging has been proven to be a very valuable analysis technique for silicon material characterization. We applied this...

Authors: Dries Van Gestel, Ivan Gordon, Jef Poortmans

Abstract: The relatively new “thin-film polycrystalline-silicon (pc-Si) (grain size of 0.1-100 µm) solar cell on foreign substrate” technology aims at...

Authors: Teimuraz Mchedlidze, Tzanimir Arguirov, Simona Kouteva-Arguirova, Martin Kittler

Abstract: Electrical and structural properties of thin-film photovoltaic (PV) material fabricated using Crystal Silicon on Glass (CSG) technology was...

Authors: Nikolai Yarykin, Olga V. Feklisova

Abstract: The Czochralski-grown silicon crystals plastically deformed at 680±C to the residual strain of 5% and subsequently annealed in the...


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