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Solid State Phenomena
Vol. 88
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Vols. 85-86
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Vols. 82-84
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Vols. 80-81
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Vols. 78-79
Solid State Phenomena
Vols. 76-77
Solid State Phenomena
Vols. 73-75
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Solid State Phenomena Vols. 76-77

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77

ToC:

Table of Contents

Paper Title Page

Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation
Authors: Hiroshi Morita, Jun ichi Ida, Osamu Ota, Kazumi Tsukamoto, Tadahiro Ohmi
245
Megasonic, Non-Contact Cleaning Followed by 'Rotagoni' Drying of CMP Wafers
Authors: Jeffrey M. Lauerhaas, Paul W. Mertens, Tom Nicolosi, Karine Kenis, Wim Fyen, Marc Heyns
251
Particle Deposition Studies in Acidic Solutions
Authors: D. Martin Knotter, Yolaine Dumesnil
255
Particle Removal Efficiency Evaluation at 40 nm Using Haze Particle Standard
Authors: Seong Ho Yoo, Benjamin Y.H. Liu, James Sun, Natraj Narayanswami, Gregory P. Thomes
259
Use of Surfactants for Improved Particle Performance of dHF-Based Cleaning Recipes
Authors: Rita Vos, Kai Dong Xu, Marcel Lux, Wim Fyen, R. Singh, Zhe Fei Chen, Paul W. Mertens, Z. Hatcher, Marc Heyns
263
The Role of Oxidant in HF-Based Solution for Noble Metal Removal from Substrate
Authors: Geun Min Choi, Ikunori Yokoi, Tadahiro Ohmi
267
Effect of Surface Charge and Fluid Properties on Particle Removal Characteristics of a Surface-Optimized REB Filter
Authors: Wayne P. Kelly, Donald C. Grant, Joseph Zahka, Wayne Huang, Srini Raghavan
271
Pattern Dependent Corrosion Effects in HF Based Post Cu CMP Cleanings
Authors: Wim Fyen, I. Teerlinck, Sebastien Lagrange, S.H. Brongersma, A. Steegen, Paul W. Mertens, Marc Heyns
275
Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors
Authors: M. Boehringer, J.E. Pillion, V. Erdmann, M. Rygula, K. Winz, P. Brauchle, D. Aquino, H. Zhang, Joseph Zahka, G. Zielonka, J. Hauber
279
New Insights into Particle Adhesion
Authors: Sean Eichenlaub, Kevin Cooper, Anand Gupta, Stephen Beaudoin
283

Showing 61 to 70 of 76 Paper Titles

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