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Solid State Phenomena
Vol. 88
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Vol. 87
Solid State Phenomena
Vols. 85-86
Solid State Phenomena
Vols. 82-84
Solid State Phenomena
Vols. 80-81
Solid State Phenomena
Vols. 78-79
Solid State Phenomena
Vols. 76-77
Solid State Phenomena
Vols. 73-75
Solid State Phenomena
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Solid State Phenomena
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Solid State Phenomena
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Solid State Phenomena Vols. 76-77

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77

ToC:

Table of Contents

Paper Title Page

Behaviors of Metallic Contaminants in Si Wafer Processing
Authors: Joong S. Jeon, Stefan De Gendt, Srini Raghavan, Marcia Almanza-Workman, Cynthia Gonsalves, Bob Ogle
123
Iron Bulk Concentration Effect on the Yield & Reliability of Thin Oxides
Authors: Kah Keen Lai, Chee Kong Leong, Hwee Ling Yeo
127
Gap States at the Interface of Ultra-Thin Oxide and Organic Films on Si(100)
Authors: T. Bitzer, T. Rada, N.V. Richardson, T. Dittrich, F. Koch
131
Modification of Low-K SiCOH Film Porosity by a HF Solution
Authors: Denis Shamiryan, Mikhail R. Baklanov, Guy Vereecke, Serge Vanhaelemeersch, Karen Maex
135
Layer-By-Layer Oxidation of Silicon
Authors: Takeshi Hattori, Kazuhiko Takahashi, H. Nohira, Tadahiro Ohmi
139
The Evolution of Chemical Oxides Into Ultrathin Oxides: A Spectroscopic Characterization
Authors: J. Eng, R.L. Opila, J.M. Rosamilia, B.J. Sapjeta, Y.J. Chabal, T. Boone, R. Masaitis, Thomas Sorsch, Martin L. Green
145
Influence of Boron and Fluorine Incorporation on the Network Structure of Ultrathin SiO2
Authors: Seiichi Miyazaki, Kazuhiro Morino, Masataka Hirose
149
The Origins of Fluorine in Dry Ultrathin Silicon Oxides
Authors: Guy Vereecke, Erika Röhr, R.J. Carter, Thierry Conard, H. De Witte, Marc Heyns
153
Structural and Electrical Characterization of Ultra-Thin SiO2 Films Prepared by Catalytic Oxidation Method
Authors: Akira Izumi, Manabu Kudo, Hideki Matsumura
157
Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements
Authors: Harald Okorn-Schmidt, C. D'Emic, R. Murphy
161

Showing 31 to 40 of 76 Paper Titles

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