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HomeMaterials Science ForumMaterials Science Forum Vols. 457-460

Materials Science Forum Vols. 457-460

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.457-460

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Paper Title Page

Photoemission Spectroscopic Studies on Oxide/SiC Interfaces Formed by Dry and Pyrogenic Oxidation

Authors: Yasuto Hijikata, Hiroyuki Yaguchi, Yuuki Ishida, Masahito Yoshikawa, Toshio Kamiya, Sadafumi Yoshida

1341

Diluted Nitric Oxide (NO) Annealing of SiO₂/4H-SiC in Cold-Wall Oxidation Furnace

Authors: Ryouji Kosugi, Kenji Fukuda

1345

Thermal Oxidation of 4H-Silicon Using the Afterglow Method

Authors: A.M. Hoff, E. Oborina, Stephen E. Saddow, A. Savtchouk

1349

Fast Oxidation of 4H-SiC at Room Temperature by Electrochemical Methods

Authors: Hideno Mikami, Tomoaki Hatayama, Hiroshi Yano, Yukiharu Uraoka, Takashi Fuyuki

1353

Characterization of a Thermal Oxidation Process on SiC Preamorphized by Ar Ion Implantation

Authors: Antonella Poggi, Roberta Nipoti, Sandro Solmi, M. Bersani, L. Vanzetti

1357

Electronic Properties of SiON/HfO₂ Insulating Stacks on 4H-SiC (0001)

Authors: Valeri V. Afanas'ev, S.A. Campbell, K.Y. Cheong, Florin Ciobanu, Sima Dimitrijev, Gerhard Pensl, Andre Stesmans, L. Zhong

1361

Characterization of Non-Equilibrium Charge of MOS Capacitors on p-Type 4H SiC

Authors: K.Y. Cheong, Sima Dimitrijev, Ji Sheng Han

1365

Structural and Electronic Properties of the 6H-SiC(0001)/Al₂O₃ Interface Prepared by Atomic Layer Deposition

Authors: Thomas Seyller, Kun Yuan Gao, Lothar Ley, Gerhard Pensl, Florin Ciobanu, A. Tadich, J.D. Riley, R.C.G. Leckey

1369

Development of Sol-Gel MgO Thin Films for SiC Insulation Applications

Authors: C. Bondoux, P. Prené, P. Belleville, F. Guillet, Robert Jérisian

1373

Effect of In-Situ Chemical Surface Treatments on AlN/SiC Interfacial Contamination

Authors: D.O. Stodilka, B.P. Gila, C.R. Abernathy, E. Lambers, F. Ren, Stephen J. Pearton

1377